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Semiconductor, Nanotechnology, MEMS Products
SAPPHIRE SERIES
CLASS 1 ROBOTIC WORK CELL SYSTEMS
Single-Chamber, Dual Chamber, Single-Chamber Polyimide, Dual Chamber
Polyimide
Convection Models:
Forced Air Internal Heating
Vacuum Models:
Vacuum Chamber System With External Heating
Temperatures to 450°C
Suggested Processes:
Vacuum Curing, Coating, Film Drying, HMDS, Image Reversal
See Brochure or View Specs [pdf]
The Sapphire Series Work Cell is a complete thermal processing system which integrates specialty heating units with robotic systems. The heating units are either high-end, stand-alone convection units or top-of-the-line vacuum systems. Options for 200MM and 300MM, one or two process chambers as required.
Benefits:
- Easily customized
- Improves process yield
- Higher throughput
- Process redundancy
- Small footprint
- Reduced maintenance costs
- Inexpensive to switch from 200MM to 300MM
- Compatibility with modern production facilities
- Inexpensive to change process type
- Allows compatibility of equipment with different processes
- Cleaner processing through automation
Features:
- One size workcell
- One robotic handler
- SMIFF port
- Single wafer transfer system
- The temperature module is selected to match the process
- Singe or dual temperature process chambers
- Wafer transfer system
- Robotic handling of cassette
- Bar code reader
For information on any of these products or on customizing
options, please contact Applied
Thermal Systems, Inc., or your local representative.
Leasing options available.
