INDEX
SEARCH
Semiconductor Industry, CMP Transfer
OMICRON SERIES
Advanced HMI
Suggested Processes:
CMP Pass-through, 200MM, 300MM
See Brochure or View Specs [pdf]
The Omicron CMP Transfer System uses the latest robotics to provide clean wafer transfer between the main process area and the CMP process area. The system is designed to fit into all factory automation.
Benefits:
- Easily customizable
- Improves process yield
- High throughput
- Small footprint
- Reduced maintenance costs
- Inexpensive to switch from 200MM to 300MM
- Compatible with modern production facilities
- Cleaner processing through automation
Features:
- One size transfer cell
- One robotic handler
- Designed for up to Class 1 operation
- State of the art robotics
- Stand-alone design
- High-laminar air flow for clean operation
- Wafer transfer system
- Robotic handling of cassette
- Bar code reader
- All parameters monitored through the HMI
- All parameters available to fit factory automation
For information on any of these products or on customizing
options, please contact Applied
Thermal Systems, Inc., or your local representative.
Leasing options available.
