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Semiconductor, Nanotechnology, MEMS Products
OMEGA SERIES
Microprocessor Control
Temperatures to 450°C
Convection Models:
Forced Air Internal Heating
Vacuum Models:
Vacuum Chamber With External Heating
Suggested Processes:
Film Drying, Wafer Curing, General Heating
See Brochure or View Specs [pdf]
The Omega Series of medium-priced process systems provides a wide range of chamber sizes, temperature ranges and heating modes. This series provides units with less stringent requirements with the same high quality. They are designed to increase yields and reduce costs for the modern semiconductor manufacturing facility.
Benefits:
- Easily customized
- Improves process yield
- Increases throughput
- Process redundancy
- Reduced maintenance costs
- Temperature ranges to 450°C
- Compatible with modern production facilities
- Full interfacing available for SECS II and GEM
- Allows compatibility of equipment with different processes
- Compatible with all safety standards
- Compatible with factory automation
Features:
- Three chamber sizes
- Systems designed for parts storage
- Flexible shelf layout for customer convenience
- Designed for up to Class 100 operation
- Fully computer controlled with SECII and GEM
- Small footprint
- Tabletop design
- Full HMI interface with flat panel touch screen available
- Designed as a stand-alone system to include vacuum gate valve
- Bar code reader option
For information on any of these products or on customizing
options, please contact Applied
Thermal Systems, Inc., or your local representative.
Leasing options available.
