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Semiconductor, Nanotechnology, MEMS Products
GEMINI
SERIES - SPECIALTY
Vacuum Chamber System With External Heating
Temperatures to 250°C
Suggested Processes:
HMDS, Image Reversal
See Brochure or View Specs [pdf]
The Gemini Series of top-of-the-line vacuum systems provides a wide range of chamber sizes and temperature ranges; clean-room and coating options. They are designed to increase yields and reduce expenses for the modern semiconductor manufacturing facility.
Benefits:
- Easily customized
- Improves process yield
- Increases throughput
- Reduces floor space requirements
- Reduces maintenance costs
- Temperature ranges to 250°C
- Compatible with modern production facilities
- Full interfacing available for SECSII and GEM
- Allows compatibility of equipment with different processes
- Cleaner processing through automation
- Compatible with factory automation
Features:
- Three chamber sizes
- Adaptable to automation operation
- Fully computer controlled with SECII and GEM options
- Small footprint
- Tabletop design
- Full HMI interface with flat panel touch screen
- 18 models to meet your process needs
- Designed as a stand-alone system to include vacuum gate valve
- Bar code reader option
For information on any of these products or on customizing
options, please contact Applied
Thermal Systems, Inc., or your local representative.
Leasing options available.
