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Semiconductor, General Heating Products
DELTA SERIES
Microprocessor Control
Temperatures to 325°C
Convection Models:
Forced Air With Internal Heating
Vacuum Models:
Vacuum Chamber System With External Heating
Suggested Processes:
General Purpose/Any Industry
See Brochure or View Specs [pdf]
The Delta Series of low-cost process systems provides a wide range of chamber sizes, temperature ranges and heating modes. This series provides units with less stringent requirements with the same high quality. They are designed to increase yields and reduce costs for the modern semiconductor manufacturing facility.
Benefits:
- Easily customized
- Improves process yield
- Increases throughput
- Process redundancy
- Reduced maintenance costs
- Temperature ranges to 325°C
- Compatible with modern production facilities
- Allows compatibility of equipment with different processes
- Compatible with all safety standards
Features:
- Three chamber sizes
- Systems designed for parts storage
- Flexible shelf layout for customer convenience
- Full computer controlled with SECII and GEM options
- Small footprint
- Tabletop design
- Designed as a stand-alone system to include vacuum gate valve
For information on any of these products or on customizing
options, please contact Applied
Thermal Systems, Inc., or your local representative.
Leasing options available.
