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Semiconductor, Nanotechnology, MEMS Products
ALPHA SERIES
Vacuum Chamber System With External Heating Advanced
HMI Control
Temperatures up to 250°C
Suggested Processes:
Flat Panel Processing and Parts Drying
See Brochure or View Specs [pdf]
The Alpha Series of vacuum drying systems provides a wide range of chamber sizes and temperature ranges designed to be an efficient processing tool for larger Flat Panel displays or store equipment parts in a clean environment until needed for production. This results in increased yields and reduced expenses for the modern semiconductor manufacturing facility.
Benefits:
- Easily customized
- Improves process yield
- Increases throughput
- Reduces floor space requirements and maintenance costs
- Compatible with modern production facilities
- Full interfacing available for SECII and GEM
- Allows compatibility of equipment with different processes
- Compatible with all safety standards
- Provides clean, dry storage area for quick parts change
Features:
- Three chamber sizes
- Systems designed for parts storage
- Designed for class 10 operation (Class 1 optional)
- Flexible shelf layout for customer convenience
- Fully computer controlled with SECII and GEM options
- Small footprint
- Full HMI interface with flat panel touchscreen
- Stand-alone design
- 3 models to meet your process needs
- Designed as a stand-alone system to include vacuum gate valve
- Bar code reader option
For information on any of these products or on customizing
options, please contact Applied
Thermal Systems, Inc., or your local representative.
Leasing options available.
